发明名称 A METHOD OF PRODUCING A DETECTOR BELONGING TO A GAS SENSOR, AND A DETECTOR PRODUCED IN ACCORDANCE WITH THE METHOD
摘要 The present invention relates to a method of producing a gas sensor co-acting detector intended for the detection of electromagnetic waves, such as infrared light rays, that pass through a gas cell. The gas cell (2) includes a cavity (21), which functions to enclose a gas volume (G) for measuring of evaluating purposes. The surface or parts of the surface forming walls within the gas cell or the cavity is/are coated with one or more different metal layers (M1, M2) with the intention of providing a highly reflective surface for reflection of said electromagnetic waves. The detector (3) is comprised of a thermal element and is formed on a base structure (31). That part of the base structure that shall form said detector is comprised of one or more topographically structured surface regions. At least said surface region or surface regions is/are coated with a first and a second electrically conductive metal layer (M1 and M2 respectively) which are intended to form said thermocouple. The first metal layer (M1) is applied at a first angle other than 90~, and the second metal layer (M2) is applied at a second angle which is also other than 90~ and which differs from the first angle. The topographical structure and/or configuration including the thus coated electrically conductive layers provides the function of one or more thermocouples, by virtue of the first and the second metal layers (M1, M2) overlapping each other within discrete detector-associated surface parts.
申请公布号 CA2320919(A1) 申请公布日期 1999.08.19
申请号 CA19992320919 申请日期 1999.02.04
申请人 MARTIN, HANS GORAN EVALD;OHMAN, PER OVE 发明人 MARTIN, HANS GORAN EVALD;OHMAN, PER OVE
分类号 G01N21/03;B81B1/00;B81C1/00;B81C99/00;G01J5/12;G01N21/35;G01N27/447;G02B3/00;G02B6/36;G02B6/42;H01L21/02;H01L21/48;H01L27/16;H01L35/08;H01L35/34;(IPC1-7):G01N21/35;H01L35/32;G01J1/42 主分类号 G01N21/03
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