Removal of arbitrary structures of brittle materials by laser pulses

摘要

Each laser pulse with a specified peak power is used to remove a material volume element with a depth not substantially in excess of 10 mu m. The pulse duration is of an order of 10<-5> seconds, with the pulse rise time not less than 10<-5> seconds. The pulse succession frequency and the motion of the laser beam relative to the work piece are not exclusively determined by the required degree of overlapping of adjacent focal spots to ensure a smooth boundary structure. They are also determined by the summary heat effect produced by removal of material volume elements. Removal of such elements with a maximum depth mentioned above takes place in layers until the desired depth of material removal has been reached.