Method for preparing a superconducting thin film of compound oxide,申请号EP19920402175-传众专利搜索

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发明名称	Method for preparing a superconducting thin film of compound oxide
摘要
申请公布号	EP0526326(B2)	申请公布日期	1999.08.18
申请号	EP19920402175	申请日期	1992.07.28
申请人	SUMITOMO ELECTRIC INDUSTRIES, LTD.	发明人	ITOZAKI, HIDEO;NAGAISHI, TATSUOKI;NAKANISHI, HIDENORI;TANAKA, SABURO
分类号	C23C14/34;C23C14/28;C30B29/22;H01B12/06;H01B13/00;H01L21/203;H01L39/24;(IPC1-7):H01L39/24	主分类号	C23C14/34
代理机构		代理人
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