| 摘要 |
Compound diffractive optics 190,192 are used in an interferometer for simultaneously measuring multiple surfaces, making multiple measurements of individual surfaces 196, conveying test beams multiple times, and aligning pairs of the diffractive optics with each other. The compound optics have two diffraction zones 198,200 that reshape test beams for reflecting from test surfaces or for combining with reference beams, for the measurement of a single surface 196 at two diffraction angles simultaneously. Test beams 204,208, reference beams 206,210, a primary beam 202 and test piece 194 are shown.
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