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发明名称
Method and apparatus for immersion cleaning of semiconductor devices
摘要
申请公布号
GB9914214(D0)
申请公布日期
1999.08.18
申请号
GB19990014214
申请日期
1999.06.17
申请人
SPEEDFAM CORPORATION
发明人
分类号
B08B3/10;B01D19/00;B01D61/00;B08B3/04;H01L21/00;H01L21/304
主分类号
B08B3/10
代理机构
代理人
主权项
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