Method of producing dielectric thin film element,申请号EP19960304787-传众专利搜索

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发明名称	Method of producing dielectric thin film element
摘要
申请公布号	EP0754776(B1)	申请公布日期	1999.08.18
申请号	EP19960304787	申请日期	1996.06.28
申请人	SHARP KABUSHIKI KAISHA	发明人	ARAI, HISAKO;MASUDA, YOSHIYUKI;KITA, RYUSUKE;OHTANI, NOBORU;MATSU, YOSHIYUKI;KOBA, MASAYOSHI
分类号	C04B35/46;C23C14/08;C23C14/34;C23C14/35;C23C14/54;C23C14/58;H01L21/283;C01B13/14;(IPC1-7):C23C14/08	主分类号	C04B35/46
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