Crystal growth observing apparatus

摘要

A STM drive mechanism (3) capable of moving a scanning tunnelling microscope (STM) (2) incorporated with a molecular beam epitaxy (MBE) device (1) in the MBE device under vacuum and a substrate holder (11) with a wide clearance formed between a substrate heating system (14) and the substrate holder are provided, and the STM is protected by a heat insulating shield (21) from high vapour pressure atmosphere and radiant heat according to substrate heating.