发明名称 Capacitor produced in a semiconductor device
摘要 A capacitor having the pipe structure produced in a semiconductor device, wherein the number of combinations of two pieces of pipe shaped electrodes which face to each other across a pipe shaped dielectric layer is plural, so that the capacitor of this invention is allowed to have a large surface area in which two electrodes face to each other across a dielectric layer, resultantly increasing the amount of electrostatic capacity per unit horizontal area thereof without being accompanied by a decrease in integration and a decrease in the mechanical reliability.
申请公布号 US5939747(A) 申请公布日期 1999.08.17
申请号 US19970892885 申请日期 1997.07.15
申请人 OKI ELECTRIC INDUSTRY CO., LTD. 发明人 YAJIMA, TSUKASA
分类号 H01L27/04;H01L21/02;H01L21/822;H01L21/8242;H01L27/108;(IPC1-7):H01L27/108;H01L29/76 主分类号 H01L27/04
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