发明名称 Methods and apparatus for conditioning grinding stones
摘要 The present invention relates generally to a method for conditioning polishing materials that are generally used to polish disks used for magnetic recording. The polishing material is conditioned by moving a conditioning ring relative to the polishing material. More particularly, the conditioning ring is rotated and/or orbited across the surface of the polishing material, so that the material is conditioned. Preferably, the conditioning ring comprises an annular ring of abrasive material fixedly applied to a substantially planar surface of the conditioning ring.
申请公布号 US5938506(A) 申请公布日期 1999.08.17
申请号 US19970868110 申请日期 1997.06.03
申请人 SPEEDFAM-IPEC CORPORATION 发明人 FRUITMAN, CLINTON;SCOTT, PHILBIN;CESNA, JOSEPH
分类号 B24B37/00;B24B33/055;B24B37/04;B24B53/02;(IPC1-7):B24B1/00 主分类号 B24B37/00
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