发明名称 |
Methods and apparatus for conditioning grinding stones |
摘要 |
The present invention relates generally to a method for conditioning polishing materials that are generally used to polish disks used for magnetic recording. The polishing material is conditioned by moving a conditioning ring relative to the polishing material. More particularly, the conditioning ring is rotated and/or orbited across the surface of the polishing material, so that the material is conditioned. Preferably, the conditioning ring comprises an annular ring of abrasive material fixedly applied to a substantially planar surface of the conditioning ring.
|
申请公布号 |
US5938506(A) |
申请公布日期 |
1999.08.17 |
申请号 |
US19970868110 |
申请日期 |
1997.06.03 |
申请人 |
SPEEDFAM-IPEC CORPORATION |
发明人 |
FRUITMAN, CLINTON;SCOTT, PHILBIN;CESNA, JOSEPH |
分类号 |
B24B37/00;B24B33/055;B24B37/04;B24B53/02;(IPC1-7):B24B1/00 |
主分类号 |
B24B37/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|