发明名称 |
Method for increasing field emission tip efficiency through micro-milling techniques |
摘要 |
A method of fabricating electron emission structures 30 having enhanced emission characteristics. The method comprising the steps of providing a substrate 10 having electron emission structures 5 thereon and having a gate layer 6 over the electron emission structures 5. Then modifying the electron emission structures with a focused beam to create modified electron emission structures 30 with enhanced emission efficiency.
|
申请公布号 |
US5938493(A) |
申请公布日期 |
1999.08.17 |
申请号 |
US19960768724 |
申请日期 |
1996.12.18 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
VICKERS, KENNETH G. |
分类号 |
H01J9/02;(IPC1-7):H01J9/00;H01J1/02 |
主分类号 |
H01J9/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|