发明名称 |
Method and apparatus for coating a film on an object being processed |
摘要 |
Disclosed herein is a method and an apparatus for applying a coating liquid to an object from a liquid-applying member at a first prescribed position, thereby forming a film on the object. Before the coating liquid at the first position, the coating liquid is applied at a second predetermined position. An impurity-detecting device detects the impurities contained in the coating liquid applied at the second position. A particle-counting device is provided, and a switching device is provided on a liquid-supplying pipe extending from a source of the coating liquid to the liquid-applying member. The switching device switches the supply of the coating liquid between the liquid-applying member and the impurity-detecting device. The impurities in the coating liquid can thereby monitored.
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申请公布号 |
US5938847(A) |
申请公布日期 |
1999.08.17 |
申请号 |
US19970915737 |
申请日期 |
1997.08.21 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
AKIMOTO, MASAMI;YOSHIOKA, KAZUTOSHI;SAKAMOTO, KAZUO;SEMBA, NORIO |
分类号 |
B05C11/08;(IPC1-7):G03G15/08;G01V8/00 |
主分类号 |
B05C11/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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