| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a high-quality SEM image with good reproducibility for a sample liable to cause charge-up by repeatedly scanning an electron beam N times staggeringly at uniform intervals, and moving the sample at the prescribed speed in the direction opposite to the staggering direction of the scanning positions of the electron beam at the same time. SOLUTION: An electron beam 2 is scanned N times staggeringly at uniform intervals by a scanning control device 9. The scanning control device 9 controls a stage moving device 7 to continuously move a stage 6 at the speed (L/ t)(N-1)/ N(k-1)} in the direction opposite to the scanning direction of the scanning positions of the electron beam 2 (N-1) times, where (t) is the total time required for one scan and flyback of the electron beam 2, and (k) is a natural number of 2 or above. The electron beam 2 can be scanned on a sample 5 at the constant interval L(N-1)/ N(k-1)}. The parameters N, L and (t) can be set to the optimum values within the ranges to satisfy this condition.</p> |
