发明名称 3D array optical displacement sensor and method using same
摘要 This is an invention related to an apparatus for non-contact displacement measurement over an area. The apparatus is suitable for a small dynamic range with extremely high sensitivity. The area of measurement can be reconfigured as image processing technique is employed. The sensor is small and light in size.
申请公布号 US5940566(A) 申请公布日期 1999.08.17
申请号 US19970956713 申请日期 1997.10.23
申请人 HEWLETT-PACKARD COMPANY 发明人 SENG, TOH PENG
分类号 G01B11/00;G01B11/245;G01B11/30;G02B6/00;H05K13/08;(IPC1-7):G02B6/00;G02B6/06 主分类号 G01B11/00
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