发明名称 |
Method for extended ion implanter source lifetime |
摘要 |
The life of a source filament in an ion implantation tool is extended by providing in the ion implantation tool both an ion source reactant gas for providing a source of ion species to be implanted and a counteracting gas to counter the chemical transport from or to the filament, depending upon the reaction that occurs between the ion source gas ions and the source filament.
|
申请公布号 |
US5940724(A) |
申请公布日期 |
1999.08.17 |
申请号 |
US19970845970 |
申请日期 |
1997.04.30 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
WARREN, RONALD A. |
分类号 |
H01J27/08;H01J37/317;(IPC1-7):H01L21/425 |
主分类号 |
H01J27/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|