| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device carrier that prevents works from jumping out, ensures its stable rotation during work polishing and causes almost no vibration, by lowering an aligning point. SOLUTION: The carrier main body 2 of a carrier 1, which is constituted of a housing 20, a pressure plate 21, a retainer ring 22, a packing sheet 23 and a vibration damper ring 4, is connected to a rotary shaft 3 by way of a universal joint 30. The housing 20 and pressure plate 21 are made thin so that the aligning point P is lowered, which results in a reduction in weight of the carrier main body 2. The vibration damper ring 4 is fixed to the circumference of the housing 20 on the top so that the vibration of the carrier main body 2 is suppressed while a platen 200 is rotated. |
