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发明名称
PLANARIZATION METHOD FOR SEMICONDUCTOR
摘要
申请公布号
KR100216500(B1)
申请公布日期
1999.08.16
申请号
KR19960050242
申请日期
1996.10.30
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
KIM, TAE-KYUNG;KIM, YU-HYUN
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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