发明名称 MACHINING METHOD AND MACHINING DEVICE USING ROTARY MACHINING TOOL
摘要 PROBLEM TO BE SOLVED: To provide a machining method which has a high efficiency, almost no machining damage, and a high accuracy, and of a low cost, and a processing device for such a processing method. SOLUTION: A working fluid layer 113 is formed on the surface of a work 20 to process, a rotary processing tool 101 is fed in a cutting direction, and the processing liquid layer 113 on the surface of the work 20 is detected by the load current variation and the like of a motor 102 for machining tool rotation, before the contact with the surface of the work 20, so as to detect the position from the surface of the work 20. Depending on this positional information, the feeding speed in the cutting direction. The rotating speed, and the horizontal moving speed of the rotary machining tool, or the rotating speed and the horizontal moving speed of the work, are variable-controlled at an optimum condition, fitting to the machining conditions at the respective areas before and after the contacting with the surface of the work 20.
申请公布号 JPH11221757(A) 申请公布日期 1999.08.17
申请号 JP19980027072 申请日期 1998.02.09
申请人 HITACHI LTD 发明人 KUGAYA TAKASHI;OTSUKI SHIGEO;NISHIMURA SADAYUKI;MORIYAMA SHIGEO;KATAGIRI SOUICHI;ISHIDA YOSHIHIRO;KAWAI AKINARI;YASUI KAN
分类号 B24B37/10;B81C99/00;H01L21/304 主分类号 B24B37/10
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