| 摘要 |
PROBLEM TO BE SOLVED: To provide a projection aligning method which can adjust a projection performance with a high reproducibility. SOLUTION: Marks Mij are formed at a predetermined plurality of positions on a reticule 5 projected, and positions Tij of the marks Mij projected in an image plane through a projection lens 6 are sequentially measured with use of a laser interferometer, a fine opening 8 and a photoelectric detector 9 provided in a stage 7. Values (N,αij,βij)(whereαij andβij are errors in coordinate axis directions) corresponding to a projection magnification N of the lens 6 and distortion aberration are calculated on the basis of a positional relationship (positions Pij) of the marks on the reticle 5 and the measured positions Tij of the marks. And the positions of the optical elements (lenses) as part of the lens 6 are adjusted on the basis of the calculated values. |
