| 摘要 |
<p>A system and method for correcting a scan pattern of a moving optical scanning system (110) that scans an object or pattern (130). A gantry (120) moves the optical system at a constant rate in a first direction. Using a light source and a first deflector, the scanning system quickly sweeps a light beam in a direction orthogonal to the motion of the gantry (120) by changing the angle of deflection of the first deflector linearly with time. To compensate for the gantry motion, the optical system includes a second deflector that deflects the light at a deflection angle determined as a function of the velocity of the gantry. The deflected light is focused on the object or pattern. Accordingly, the object or pattern is scanned along a corrected scan line orthogonal to first direction. The optical scanning system may also perform 'selected' scanning and 'look ahead/look behind' scanning.</p> |
