发明名称 Verfahren zur Abscheidung von Aluminiumschichten über isolierenden Oxydsubstraten
摘要 A manufacturing method which includes forming a metallic, aluminum-containing layer (10) adherent to a surface of a body (20). The method includes the steps of depositing aluminum on the surface from an aluminum-containing vapor, and during the aluminum-depositing step, the further step of depositing arsenic, phosphorus, or antimony on the surface from the vapor. <IMAGE>
申请公布号 DE69323609(T2) 申请公布日期 1999.08.12
申请号 DE1993623609T 申请日期 1993.12.02
申请人 AT & T CORP., NEW YORK, N.Y., US 发明人 CUNNINGHAM, JOHN EDWARD, LINCROFT, NEW JERSEY 07738, US;JAN, WILLIAM YOUNG, SCOTCH PLAINS, NEW JERSEY 07076, US;RENTSCHLER, JOHN ANDERSON, BRICK, NEW JERSEY 08724, US;WARWICK, COLIN ALAN, HOLMDEL, NEW JERSEY 07737, US
分类号 C23C14/06;H01L21/203;H01L21/3205;H01L21/768;H01L23/532;(IPC1-7):H01L21/768;H01L21/320;H01L23/485 主分类号 C23C14/06
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