发明名称 ELECTROSTATIC SUBSTRATE HOLDER AND METHOD FOR USING SAME
摘要 <p>The invention concerns a substrate-holder (10) for maintaining a substrate while it is being treated. It comprises internally and without direct external electric contact, means for preserving electric charges (12, 13) to maintain, by means of the electrostatic forces generated by the presence of said electric charges, the substrate on the substrate-holder.</p>
申请公布号 WO1999040622(A1) 申请公布日期 1999.08.12
申请号 FR1999000251 申请日期 1999.02.05
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