Plasma-Entschichtungsvorrichtung mit Mikrowellenfalle
摘要
A plasma asher which obviates microwave leakage and attendant problems by providing a microwave trap (20) proximate the opening through which the plasma tube (8) exits the microwave cavity. <IMAGE>
申请公布号
DE69510576(D1)
申请公布日期
1999.08.12
申请号
DE1995610576
申请日期
1995.02.20
申请人
FUSION SYSTEMS CORP., ROCKVILLE, MD., US
发明人
KAMAREHI, MOHAMMAD, NORTH POTOMAC, MARYLAND 20849, US;SIMPSON, JAMES E., GAITHERSBURG, MARYLAND 20877, US