发明名称 Plasma-Entschichtungsvorrichtung mit Mikrowellenfalle
摘要 A plasma asher which obviates microwave leakage and attendant problems by providing a microwave trap (20) proximate the opening through which the plasma tube (8) exits the microwave cavity. <IMAGE>
申请公布号 DE69510576(D1) 申请公布日期 1999.08.12
申请号 DE1995610576 申请日期 1995.02.20
申请人 FUSION SYSTEMS CORP., ROCKVILLE, MD., US 发明人 KAMAREHI, MOHAMMAD, NORTH POTOMAC, MARYLAND 20849, US;SIMPSON, JAMES E., GAITHERSBURG, MARYLAND 20877, US
分类号 H05H1/46;G03F7/34;H01J37/32;H01L21/302;H01L21/304;H01L21/3065;H01P7/06;H05B6/76;(IPC1-7):H01J37/32 主分类号 H05H1/46
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