| 摘要 |
<p>A current measuring method which has the steps of converting a current to be measured into a voltage signal, phase-modulating the light, which permeates through an optical modulator, by this voltage signal, obtaining interference light by allowing the phase-modulated light to interfere with non-phase-modulated light, and measuring the object current on the basis of the intensity of the interference light. An IC tester is also proposed which is adapted to measure a current flowing in a power source terminal of an IC to be tested, by using this current measuring method, and judge that the object IC is defective when the resultant current value is larger than a predetermined value.</p> |
