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发明名称
Method of producing metallic thin film
摘要
申请公布号
EP0513821(B1)
申请公布日期
1999.08.11
申请号
EP19920108247
申请日期
1992.05.15
申请人
HORIBA, LTD.
发明人
TONMITA, KATSUHIKO
分类号
C23C18/08;C23C18/12;C23C18/42;G01N27/12;G01N27/333;H05K3/10;G01N27/414;(IPC1-7):C23C18/12
主分类号
C23C18/08
代理机构
代理人
主权项
地址
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