发明名称 |
Method of producing acceleration sensors |
摘要 |
PCT No. PCT/DE96/01236 Sec. 371 Date Oct. 27, 1997 Sec. 102(e) Date Oct. 27, 1997 PCT Filed Jul. 9, 1996 PCT Pub. No. WO97/04319 PCT Pub. Date Feb. 6, 1997A method for producing acceleration sensors is proposed, in which a silicon layer that is deposited in an epitaxial application system is used. Above sacrificial layers (2) applied to the substrate (1), the material grows in the form of a polysilicon layer (6), which has a certain surface roughness. By application of a photoresist and by a wet etching process, this surface roughness is eliminated. Alternatively, chemical-mechanical smoothing is contemplated. |
申请公布号 |
US5937275(A) |
申请公布日期 |
1999.08.10 |
申请号 |
US19970809945 |
申请日期 |
1997.10.27 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
MUENZEL, HORST;OFFENBERG, MICHAEL;HEYERS, KLAUS;ELSNER, BERNHARD;LUTZ, MARKUS;SKAPA, HELMUT;VOSSENBERG, HEINZ-GEORG;BUCHAN, NICHOLAS;GRAF, ECKHARD |
分类号 |
G01P15/08;H01L29/84;(IPC1-7):G01L23/10;G01P15/09 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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