| 摘要 |
<p>PROBLEM TO BE SOLVED: To embody the fine processing of contact holes and to improve the aperture ratio of a liquid crystal display device having high fineness and high density by improving the alignment accuracy of a conductive thin film to pattern shapes at the time of forming the contact holes in a photpsensitive resin film insulating the conductive thin film. SOLUTION: The photosensitive acrylic resin film 12 of the region [B] smaller than the pattern of a source electrode 28 in a source electrode 28 region is exposed and is then subjected to development by an alkaline soln. With the exposed region [B] removed by etching as a start, the alkaline soln. is penetrated between the photosensitive acrylic resin film 12 and the source electrode 28 and the photosensitive acrylic resin film 12 of the shape nearly resembling the shape of the pattern region [A] of the source electrode 28 by the weakness of the adhesion property to the alkaline soln. between the photosensitive acrylic resin film 12 and the source electrode 28 is peeled and removed, by which the contact hole 31 is formed.</p> |
