| 摘要 |
PROBLEM TO BE SOLVED: To improve the performance of an element in an inductance element, constituted of an applying type planar-shaped magnetic core layer and a planar- type coil. SOLUTION: A nitride layer 12 which exhibits superior diffusion preventing effects on a magnetic core layer 13 at heat treatment, and which shows a sufficient bounding force and low reactivity to a base substrate 11 is formed on the base substrate 11. Then, the applying type planar-shaped magnetic core layer 13 is provided through the nitride layer 12. Moreover, a planar-type coil 14 is formed on the magnetic core layer 13. Thus, the diffusion of elements constituting the base substrate 11 in the magnetic core layer 13 in the magnetic core layer 13 can be prevented by the nitride layer 12 at the heat treatment, and the deterioration of permeability μ of the magnetic core layer 13 can be prevented. |
