发明名称 PRODUCTION OF CO-CR-ZR ALLOY SPUTTERING TARGET MATERIAL
摘要 PROBLEM TO BE SOLVED: To obtain a material having high density/high strength and finely dispersing aαphase of Co-Cr alloy phase by accommodating Co-Cr-Zr alloy powder in a metal capsule in an appropriate quantity, evacuating/sealing, heating/strongly pressurizing in a compacting die, taking out a compact to cool and removing a metal part coming from a capsule. SOLUTION: It is appropriate to disperse aαphase of a Co-Cr alloy phase in a size of >=10μm. A composition of a Co-Cr-Zr alloy target consists of 20-40% Cr, 3-50% Zr and the balance Co. A heating temp. of a capsule is >=150 deg.C of the melting point. As an example of a used capsule is of a carbon steel of 148 mm outside diameter, 4 mm thickness, 100 mm length. Alloy powder is produced by e.g. a gas atomizer process. The produced target material is free from crack in machining, a desired alloy target material having mechanical strength is obtained.
申请公布号 JPH11217668(A) 申请公布日期 1999.08.10
申请号 JP19980017182 申请日期 1998.01.29
申请人 SANYO SPECIAL STEEL CO LTD 发明人 AIKAWA YOSHIKAZU;OKAWA ATSUSHI
分类号 C22C19/07;C23C14/34;(IPC1-7):C23C14/34 主分类号 C22C19/07
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