OPTICAL SYSTEM AND EXPOSURE DEVICE AND PRODUCTION OF SEMICONDUCTOR DEVICE,申请号JP19980035511-传众专利搜索

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发明名称	OPTICAL SYSTEM AND EXPOSURE DEVICE AND PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH11218931(A)	申请公布日期	1999.08.10
申请号	JP19980035511	申请日期	1998.02.02
申请人	NIKON CORP	发明人	HASHIMOTO SUMIO
分类号	G03F7/20;H01L21/027;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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