| 摘要 |
PROBLEM TO BE SOLVED: To improve a fine object inspection ability by grasping, so to speak, appearance state being obtained from a multi-stage lighting image in terms of pattern matching. SOLUTION: An image signal from an image sensor 4 is converted to digital data by a conversion part 5 and is stored at a storage 6. A recognition control part 7 inspects a bump based on data obtained from the lighting of lighting devices 3a, 3b, 3c and 3d at each stage stored at the storage 6. An upper-stage image 3a and a lower-stage image 3b are suited for extracting failure of a surface state, and failure around an element, respectively. And another lighting image makes clear frailer classification. For example, when the bump has a projection, the feature does not appear in the image of the upper-stage lighting 3a, but it appears in the image of the middle upper-stage lighting 3b, the middle lower-stage lighting 3c, and the lower-stage lighting 3d. When the bump has a recess and a cut-out, the same shape as a normal bump appears in the image of the middle upper-stage lighting 3b, the middle lower-stage lighting 3c, and the lower-stage lighting 3d, but the features appears in the image of the upper- stage lighting 3a. |
