| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for the surface treatment of a vitreous carbonaceous member so as to enable the surface roughness of narrow portions of the member to be improved easily. SOLUTION: This method for improving the surface roughness of a vitreous carbonaceous member comprises exposing the to-be-improved surface of the member to a plasma 6 generated by applying high-frequency electric power from its source 4 in such a state that a mixed gas of argon and oxygen is introduced into the space between two parallel flat plate-type electrodes 2 and 3 installed in a vacuum treatment chamber 1. |
