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发明名称
DETECTION METHOD, SCANNING EXPOSURE METHOD, SCANNING EXPOSURE DEVICE, AND MANUFACTURE OF DEVICE
摘要
申请公布号
JPH11219897(A)
申请公布日期
1999.08.10
申请号
JP19980033595
申请日期
1998.01.30
申请人
NIKON CORP
发明人
IMAI YUJI;KINOSHITA NOBUYUKI
分类号
G03F7/20;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
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