| 摘要 |
PROBLEM TO BE SOLVED: To keep the flatness and perpendicularity of a surface to be ground even when the axis of rotation of a grinding wheel is not sufficiently parallel to the axis of rotation of a machining head part by using a thin leaf spring as a flexible member. SOLUTION: A machining head part in a grinding apparatus comprises machining head 2, a holding member comprising a leaf spring 3 as a soft and flexible member, a sealing plate 4 and a nozzle holder 5, a leaf spring holder 7 to support these components, an air port 8 for suction and pressurization, and a bearing cover 9 containing a bearing. The leaf spring 3 is formed of a metallic plate, and very thin and flexible, and the thickness of the leaf spring 3 is 0.05 mm in this embodiment. Even when the axis of rotation of the machining head part is slightly inclined to that of the grinding part, the angle of inclinationθbetween the axis of rotation of the machining head part and the axis of rotation of the grinding part is absorbed by the leaf spring 3, and an end face of the nozzle 10 can be horizontally pressed against the grinding surface of a grinding wheel 11. Grinding can be achieved with excellent accuracy while keeping the flatness and perpendicularity of the nozzle end face.
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