| 摘要 |
PROBLEM TO BE SOLVED: To obtain a thermal ink jet print head comprising heating elements having improved resistance fluctuation in which sealing performance is enhanced between ink and a heater by suppressing cracking in the end region of a passivation layer in the heater. SOLUTION: A thin buffer oxide layer 54 is grown on an n<+> polysilicon layer 51 in order to insulate the layer 51 from upper nitride layer 52 and tantalum layer 56. The nitride layer 52 can be made thin by introducing the butter oxide layer 54. Consequently, stress being applied to the polysilicon layer 51 is reduced and fluctuation in the resistance of a heater 50 is suppressed. Furthermore, cracking of the nitride layer 52 is suppressed and sealing properties are enhanced. |
