| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum motor in which the rotor of the motor and the magnetic rotator of a magnetic encoder are placed in a vacuum and in which its stator and a fixed-side detection part are placed in the air. SOLUTION: A vacuum motor is constituted in such a way that partitions 15 are installed between stators 7, 8 and rotors 16a, 17a, that the rotors 16a, 17a and magnetic rotators 23, 24 of magnetic encoders 11, 12 are separated so as to be placed in a vacuum and that the stators 7, 8 and fixed-side detection parts 11a, 12a are separated so as to be placed in the air. Thereby, even in an inner motor-type vacuum motor and an outer rotor-type vacuum motor, rotors and magnetic rotators of magnetic encoders can be set on the side of a vacuum, and stators and fixed-side detection parts can be set on the side of the air. The degree of freedom of the attachment of the vacuum motor to an apparatus can be increased as an actuator in a semiconductor device, a space station or the like, the vacuum motor can be miniaturized, and the space of the vacuum motor can be saved. |
