| 摘要 |
PROBLEM TO BE SOLVED: To reduce size and improve detection efficiency and angle characteristics by arranging a detector having annular detection surface coaxial with X-ray irradiation beam from an end widow type X-ray tube. SOLUTION: The distance to a hard disk (sample) 6 in X-ray generation side is shortened with the use of an end window type X-ray tube 2 and the distance in the detection side is prolonged by using an annular X-ray detector 3 and gaining a solid angle in the arrangement. Primary X-ray 4 radiated from an X-ray tube 2 is collimated to be a specific dimension and irradiated passing through the middle of the detector 3. The detector 3 measures the intensity of fluorescence X-ray (Ni-Kα) 5 using the reflection light from the hard disk 6 and detects the film thickness of non-electrolysis nickel plating applied on the surface of the disk 6. By this, the monitor can be reduced to a dimension of half or less and such line characteristics as angle characteristic and distance characteristic are improved and so the monitor may be placed in-line with small arrangement space and exact and quick monitoring is available. |
