发明名称 |
Method of forming a piezoelectric layer with improved texture |
摘要 |
A method is provided for forming a piezoelectric layer with improved texture. In the method, a seed material is deposited on a substrate (12) at a low deposition rate to form a seed layer (16). The low deposition rate may be a rate in the range of 10.0-150 nanometers per hour. A piezoelectric material is deposited on the seed layer at a high deposition rate to form a bulk piezoelectric layer (20) having improved texture. The high deposition rate can be a rate in the range of 500-5000 nanometers per hour.
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申请公布号 |
US5935641(A) |
申请公布日期 |
1999.08.10 |
申请号 |
US19970946631 |
申请日期 |
1997.10.07 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
BEAM, III, EDWARD A.;PURDES, ANDREW J. |
分类号 |
C23C16/02;C30B23/02;C30B25/02;C30B25/18;H01L41/22;(IPC1-7):C23C16/34;C23C14/08 |
主分类号 |
C23C16/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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