摘要 |
PCT No. PCT/EP96/04074 Sec. 371 Date Jul. 23, 1997 Sec. 102(e) Date Jul. 23, 1997 PCT Filed Sep. 18, 1996 PCT Pub. No. WO97/11589 PCT Pub. Date Mar. 27, 1997A coating for the structured production of conductors on the surface of electrically insulating substrates, in particular for producing sensor elements and printed circuit boards. The coating is formed from a doped tin oxide layer having the composition Sn1-(y+z)AyBzO2, in which A is Sb or F and B is In or Al. The relative proportions in the coating of the dopants antimony (or fluorine) and indium (or aluminum) are defined by the limits 0.02<y+z<0.11 and satisfy the condition 1.4<y/z<2.2. The coating can be structured by ablation using electromagnetic laser radiation in the wavelength range 157-1064 nm. The creates an economical means for high resolution and waste-free structuring of insulating channels in thin, electrically conductive layers having high chemical, mechanical and thermal resistance on glass or ceramic substrates. |