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发明名称
摘要
申请公布号
JP2932441(B2)
申请公布日期
1999.08.09
申请号
JP19900020780
申请日期
1990.01.31
申请人
NIPPON DENKI KK
发明人
HAMAMOTO KIICHI
分类号
G02B6/13;G02B6/12;H01L21/302;H01L21/3065;H01L27/15;(IPC1-7):G02B6/13;H01L21/306
主分类号
G02B6/13
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代理人
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