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发明名称
EVALUATION SYSTEM FOR SEMICONDUCTOR DEVICE FOR HIGH FREQUENCY
摘要
申请公布号
JPH11211790(A)
申请公布日期
1999.08.06
申请号
JP19980011177
申请日期
1998.01.23
申请人
MITSUBISHI ELECTRIC CORP
发明人
SATO KUNIHIRO
分类号
G01R31/26;G01R1/06;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
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地址
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