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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH11214274(A)
申请公布日期
1999.08.06
申请号
JP19980009220
申请日期
1998.01.21
申请人
SONY CORP
发明人
HAYASHI YUJI
分类号
H01L21/66;H01L21/02;H01L21/822;H01L27/04;(IPC1-7):H01L21/02
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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