SEMICONDUCTOR ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor which is prevented from being deteriorated in sensor characteristics by a method of fixing a sensor chip. SOLUTION: A sensor chip 1 has a sensing element 20 where a piezoelectric resistor is formed, an upper cap 25 and a lower cap 26 respectively fixed above and below the sensing element 20. The sensor chip 1 converts an acceleration applied thereto into an electric signal and outputs the signal. The upper cap 25 of the sensor chip 1 is inserted into an opening 11 of a flexible substrate 10 to electrically connect a pad 27 of the sensor chip 1 with a wiring pattern 13 of the flexible substrate 10. In this state, the wiring pattern 13 at both end parts in a longitudinal direction of the flexible substrate 10 is electrically connected to an electrode of a main body circuit board 4 by soldering or the like manner, whereby the sensor chip 1 is electrically and mechanically fixed by the flexible substrate 10 to the main body circuit board 4.