| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-pressure sensor having a corrosion-resistant diaphragm suitable for various kinds of corrosive media. SOLUTION: A high-pressure converter cell is generally provided with a metallic main body having a diaphragm 26, at least one dielectric layer 28 and 38 provided to the diaphragm 26, and at least one thick-film piezo-resistance element 34 which is provided to the layers 28 and 38 to detect the deflection of the diaphragm 26. The metallic main body is made of steel and the diaphragm 26 is formed by etching or mechanically machining the metallic main body. It is preferable to form the dielectric layers 28 and 38 by performing thick-film treatment similar to that performed on the resistance element 34 and to use a material which can be stuck to the diaphragm 26. Therefore, the layers 28 and 38 can resist to the strain caused when the diaphragm 26 is deflected and can accurately transmit the strain to the resistance element 34. |
