| 摘要 |
PROBLEM TO BE SOLVED: To increase the degrees of freedom in installing this motor on an apparatus serving as an actuator in a semiconductor device, a space station or the like by forming a partition between a stator and a rotor, separating the rotor from the stator with the rotor placed in a vacuum and the stator placed in the atmosphere using the partition. SOLUTION: The end of a first cylindrical shaft 16 is protruded outwards from the first case 1, the first output rotator 20 is formed via a bearing 19, and the second output rotator 21 is formed directly. A magnetic rotator 23 facing the first stationary side detecting part 11a and a magnetic substance 9b facing the second stationary side brake 9a are formed at the outer periphery of the first cylindrical shaft 16, and a magnetic rotator 24 and a magnetic substance 10b are formed at the outer periphery of a second cylindrical shaft 17. Therefore, respective stationary side detecting parts 11a, 12a respective stators 7, 8 and respective stationary side brakes 9a, 10a on the atmosphere side, and respective magnetic rotators 23, 24, respective rotors 16, 17a, and respective magnetic substances 9a, 10b on the vacuum side are separated into the vacuum side and the on the atmosphere side by a partition. It is thus possible to keep the rotors 16a, 17a, and only connecting a shaft 22 side in a vacuum condition. |
