| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor capable of adding a new function for substrate conveyance without modifying physically the device. SOLUTION: A carrier L1 is in the middle of being conveyed from a preliminary position P2 to a process preparing position P3, and a carrier L2 stands by at the preliminary position P2, and further a carrier L3 is preparing for conveyance at a carrier mounting position P1. When an operator finds out defects in the carrier L3, the continues to push an input confirmation buttom for 3 to 10 sec. In the carrier L3 which has not yet been input for confirmation, a master controller sets it as a process releasing state. Further, when an operator find out defects in the carriers L1, L2, he continues to push an input confirmation buttom for 10 sec. or more. The master controller sets the carrier L3 as a process releasing state, and also conveys the carriers L1, L2 toward the carrier mounting position P1 by a substrate conveying robot. |
