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发明名称
SCANNING-TYPE PROBE MICROSCOPE
摘要
申请公布号
JPH11211733(A)
申请公布日期
1999.08.06
申请号
JP19980029334
申请日期
1998.01.27
申请人
JEOL LTD
发明人
IWATSUKI MASASHI
分类号
G01B7/34;G01B7/00;G01N1/28;G01N37/00;G01Q30/04;G01Q30/20;G01Q60/10;H01J37/28;(IPC1-7):G01N37/00
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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