| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an energy control device which is capable of lessening pulses in energy deviation, without being affected by a change in a laser's input/output characteristics with oscillation time. SOLUTION: The energy control device of an excimer laser device is equipped with an output control 10 for controlling pulse energy in a manner where learning control is carried out in an initial stage of each continuos pulse oscillation, when continuous pulse oscillation and interrupt of pulse oscillation made for a prescribed time are alternately carried out, an i-th command voltage Vi is calculated by updating an i-th pulse in the preceding continuos pulse oscillation with a value obtained by multiplying an energy deviation by a feedback gain G1, and thereafter each pulse is controlled, a command voltage VI is calculated by updating the just preceding command voltage VI-1 in the same continuous pulse oscillation with a value obtained by multiplying an energy deviation by a feedback gain G2. The output control 10 measures a present input/output characteristics and updates command voltage Vi and VI-1, when learning control and pulse control are carried out with feedback gains G1 and G2 corrected basing on input/output characteristics.</p> |
