| 摘要 |
PROBLEM TO BE SOLVED: To provide a new processing apparatus, which can firmly join an upper constituent member to a lower constituent member without using a clamp, and can air-tightly maintain interior of a processing chamber. SOLUTION: An outer sealing member 80 is provided with an annular projection 80b, while an inner sealing member 81 is provided with annular projections 81b and 81c which less deform than the projection 80b. Evacuation from a vacuum drawing port 75 causes easy collapse of the projection 80b of the outer sealing member 80, thus firmly joining a lid member 31 to a base part 32. Thus the need for provision of a clamp to apply a high pressure to the lid member 31 as in the prior art can be eliminated. |
