| 摘要 |
PROBLEM TO BE SOLVED: To make estimable a measurable limit flow rate and reduce the cost, time, etc., necessary for development. SOLUTION: A flow rate is detected on the basis of fluid vibration of a jet jetting from a nozzle channel 210 constituting a part of a two-dimensional channel so formed that the dimension in he thickness direction is constant. When the dimension in the thickness direction is assumed to be H, the limit flow rate is Qc, and a proportion constant is K, a relation Qc=k×H is used, and the limit flow rate Qc is estimated from the dimension H in the thickness direction. When the unit of the dimension H in the thickness direction is (m), and the unit of the limit flow rate Qc is m<3> /h, the constant K is given as K=6.6×10<2> m<2> /h.
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