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发明名称
SPATTER CATHODE
摘要
申请公布号
JPH11213939(A)
申请公布日期
1999.08.06
申请号
JP19980308563
申请日期
1998.10.29
申请人
LEYBOLD SYST GMBH
发明人
ADAM ROLF;KREMPEL-HESSE JOERG;BAEHR MARTIN
分类号
C23C14/35;H01J37/34;(IPC1-7):H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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